Abstract: Refractive index measurements have established themselves as the technique of choice for qualifying peroxide content in slurries for CMP of tungsten. Many emerging process flows use CMP as a ...
Smart citations by scite.ai include citation statements extracted from the full text of the citing article. The number of the statements may be higher than the number of citations provided by ACS ...
This code has been used and tested on Windows 10 (UPLC-MS and NMR control PCs) and Windows 11 (development). The package makes use of the following dependencies and was tested with the following ...
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