Shrinking technology nodes and smaller process margins require improved photolithography overlay control. Generally, overlay measurement results are modeled with Cartesian polynomial functions for ...

Semiconductor process engineers would love to develop successful process recipes without the guesswork of repeated wafer testing. Unfortunately, developing a successful process can’t be done without ...

Systems-based pharmaceutics case studies, challenges, and new uses were discussed at PSE’s Advanced Process Modeling Forum. Systems-based Pharmaceutics (SbP) uses a systems engineering approach and ...

Aspen Technology's Elinor Price describes how advanced process control modeling and simulation can become part of the modern control room. An upcoming feature article in January, "Changing Workforce ...